Wafer process
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BlueDUV
■ Photoluminescence mapping system
■ Model number:Ywafer GS4RW
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BlueDUV
■ Photoluminescence mapping system
■ Model number:Ywafer RD8
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Phosphor
■ Phosphor Plate Mapping System
■ Model number:YB4
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Phosphor
■ Phosphor Plate Mapping System
■ Model number:RD8
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Coating
■ In-situ Crystal Growth Monitoring System
■ Model number:YGrowthMonitor
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Coating
■ Reactive Plasma Deposition System
■ Model number:RPD-1000